G. Hallewell (CERN/CPPM), E. Anderssen (LBNL), D. Bintinger (LBNL), M. Bosteels (CERN), P. Bouvier (U. Geneva), B. Payne (RAL), R. English (RAL), J. Godlewski (Crackow/CERN), B. Gorski (Crackow), S. Grohmann (CERN/Dresden), T. Hayler (RAL), T. Jones (Liverpool), S. Lindsay (Melbourne), W. Miller (Hytec Inc, N.M.), T. Niinikoski (CERN), J. Olszowska (Crackow), A. Pilling (RAL), M. Olcese (INFN Genoa), E. Perrin (U. Geneva), H. Sandaker (CERN/Oslo) J. Thadome (Wuppertal), V. Vacek (CERN/Czech Technical University, Prague) !! We report on the development of evaporative fluorocarbon cooling for the ATLAS Pixel and Semiconductor Tracking (SCT) detectors. The front- end electronics and silicon substrates of these detectors collectively dissipate around 50kW of heat, which must be removed from the ATLAS inner detector cavity. For an operational lifetime of around 10 years in the high radiation field close to the LHC beams, the silicon substrates of these detectors must operate at a temperature below around -6 deg C, with only short warm-up periods each year for maintenance. In the case of the pixel B-physics layer, at a radius of 4.5 cm from the beams, removal will likely be necessary every year once LHC starts full luminosity operation. This layer demands a particularly low contribution of dead material, including cooling services, to its radiation length. Our studies are directed to cooling systems presenting the minimal possible material contribution in the tracker active volume: evaporative fluorocarbon cooling systems have proved preferable since they combine high heat transfer coefficients with very low circulating coolant mass (in the range 1 - 2 gm/second per 100 Watts to evacuate). Liquid refrigerant can be delivered directly to the detector in capillaries with inner diameters as small as 0.6 mm. The fluorocarbon refrigerants are furthermore non-flammable, non-toxic, non-conductive and have zero ozone depletion potential. We have constructed two evporative recirculators, and will present data from studies of the cooling of representative prototype ATLAS Pixel and SCT detector thermo-structures. In some cases, these structures employ very high thermal conductivity Carbon-Carbon composites. Cooling data were taken with the following refrigerants, shown with their chemical formulae and saturated vapor pressures at a reference temperature of -15 deg C. Per-fluoro-n-propane (C3F8) 2.2 bar (abs) Per-fluoro-n-butane (C4F10) 450mbar (abs) Tri-fluoro-iodo-methane (CF3I) 1.1 Bar (abs) Custom mixtures of C3F8 and C4F10 target: 1 Bar (abs). A target tube temperature of -15 deg C is chosen to accommodate thermal impedance effects between the silicon substrate and the flowing coolant. A target tube pressure of 1 bar (abs) is chosen to allow the use of very low mass (typically 0.2 mm wall aluminum or CFRP composite) in various cross sections. Heat transfer coefficients in the range 2000-4000 W/sq.m-Kelvin have been measured in a 3.6 mm inner diameter heated tube dissipating the full equivalent power (around 110 Watts) of a barrel SCT detector "stave". Data will be presented for a range of power dissipations and mass flows in the fluids above. For custom fluorocarbon mixtures, thermo-physical properties including enthalpy-pressure relations, vapor pressure, viscosity and speed of sound have been calculated with NIST/NBS software, and a sonar mixture analyzer has been constructed to aid in mixing. Results on mixture analysis and performance will be presented. Finally, aspects of full scale evaporative cooling circulator design for the ATLAS experiment will be discussed, together with plans for future development. !! We report on the development of evaporative fluorocarbon cooling for the ATLAS Pixel and Semiconductor Tracking (SCT) detectors from which it will be necessary to remove 50kW of heat from the detector cavity. We will present data from studies of the cooling of representative prototype ATLAS Pixel and SCT detector thermo-structures. Cooling data were taken with per-fluoro-n-propane (C3F8), per-fluoro-n-butane (C4F10), Tri-fluoro-iodo-methane (CF3I) and custom mixtures of C3F8 and C4F10. Heat transfer coefficients in the range 2000-4000 W/sq.m-Kelvin have been measured in a 3.6 mm inner diameter heated tube dissipating the full equivalent power (around 110 Watts) of a barrel SCT detector "stave". Data will be presented for a range of power dissipations and mass flows in the fluids above. For custom fluorocarbon mixtures, thermo-physical properties have been calculated, and a sonar mixture analyzer has been constructed to aid in mixing. Aspects of full scale evaporative cooling circulator design for the ATLAS experiment will be discussed, together with plans for future development. !!